Product name: Hexamethyldisilazane
C A S: 999-97-3
Molecular formula: C6H19NSi2
Molecular weight: 161.39
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Chemical name: Hexamethyldisilazide (amine)alkane; 1,1,1,3,3,3-Hexamethyldisilazane; Electronic Grade HMDS
Molecular formula: C6H19NSi2
Chemical structural formula:
Main Technical Index
|
Item |
Index |
|
Appearance |
Colorless transparent liquid |
|
Assay |
≥99.9% |
|
Refractive index (25°） |
1.4060-1.4100 |
|
Density |
0.770-0.780 |
|
Free available chlorine |
≤2 ppm |
|
Metal ions |
<5 ppb |
|
Water |
<50 ppm |
|
Particle 0.5um |
<50 |
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